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2003-02-05 |
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| ㆍ응용분야 | 전기전자, 기계, 화학 |
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ㆍ추천: 0 ㆍ조회: 1271  
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D12 Wafer Cassette Presence Detection in Vacuum
During a transfer operation, presence of a wafer on the end effector of a robot arm is necessary. No view ports are available to sense the wafer externally. The VFT-M8MVS allows a single optical feed through from the ambient side of the chamber. (Two feed throughs are required for this application.) Special fiber optic model IMT.753SMVF (used in pairs), is constructed without the optical epoxies or plastics that can create contamination issues in the transfer chamber. Externally, the PIF66UMVFA plastic fibers carry the light signals to and from the D12SN6FP sensor. These plastic fibers are easily field modifiable for length.
Objective:
To determine if a wafer is present on a robotic arm in a vacuum environment
Sensor Models:
D12SN6FP
Fiber Optic Models:
Feedthrough VFT-M8MVSM, fibers PI66UMVFA & IMT.753SMVF
자료출처 : BANNER
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