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¤ýÀÛ¼ºÀÏ 2003-02-10
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PicoDot Wafer Flat Finder

Semiconductor wafers are positioned such that the edge of each wafer is sensed by the PicoDot, exactly at the sensor focus. The wafer is rotated. The PicoDot looses its return light signal when the flat is rotated into view of the sensor (i.e. the surface of the flat falls beyond the focus point of the sensor).


Objective:
To position semiconductor wafers by sensing the locator "flat".

Sensor Models:
PicoDot¢ç convergent mode model PD45VN6C100.

ÀÚ·áÃâó : BANNER

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244
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243
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242
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241
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240
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239
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238
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237
PresencePLUS Gear Curing Verification Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-11 712
236
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PicoDot Wafer Flat Finder Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-10 1709
234
PICO-AMP Wafer Protrusion Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-10 947
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