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| ㆍ작성일 |
2003-02-05 |
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| ㆍ응용분야 | 전기전자, 기계, 화학 |
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ㆍ추천: 0 ㆍ조회: 1275  
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D12 Wafer Cassette Presence Detection in Vacuum
During a transfer operation, presence of a wafer on the end effector of a robot arm is necessary. No view ports are available to sense the wafer externally. The VFT-M8MVS allows a single optical feed through from the ambient side of the chamber. (Two feed throughs are required for this application.) Special fiber optic model IMT.753SMVF (used in pairs), is constructed without the optical epoxies or plastics that can create contamination issues in the transfer chamber. Externally, the PIF66UMVFA plastic fibers carry the light signals to and from the D12SN6FP sensor. These plastic fibers are easily field modifiable for length.
Objective:
To determine if a wafer is present on a robotic arm in a vacuum environment
Sensor Models:
D12SN6FP
Fiber Optic Models:
Feedthrough VFT-M8MVSM, fibers PI66UMVFA & IMT.753SMVF
자료출처 : BANNER
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글 제 목 |
응용분야 |
작성일 |
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299 |
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 MINI-BEAM Expert Printed Circuit Board Registration
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전기전자, 기계, 화학
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2003-02-18
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1315
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298 |
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진공용 반송 시스템에서의 웨이퍼 검출
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전기전자, 기계
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2002-10-20
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1313
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297 |
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최하단 웨이퍼 검출
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전기전자, 기계
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2002-10-27
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1307
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296 |
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콘덴서의 종류 판별
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전기전자, 기계
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2002-11-21
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1304
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295 |
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PresencePLUS Nozzle Inspection
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전기전자, 기계, 화학
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2003-02-20
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1296
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294 |
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Q45U Loop Tension Monitoring
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전기전자, 기계, 화학
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2003-02-14
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1292
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293 |
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D12 Wafer Cassette Presence Detection in Vacuum
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전기전자, 기계, 화학
|
2003-02-05
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1275
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292 |
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MICRO-SCREEN Lead Form and Trim Guarding
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전기전자, 기계, 화학
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2003-02-21
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1273
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291 |
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LT3 Box Width Measurement
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전기전자, 기계, 화학
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2003-02-17
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1272
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290 |
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PresencePLUS Product Orientation
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전기전자, 기계, 화학
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2003-02-20
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1268
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289 |
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사출 성형기의 금형 위치 결정
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기계, 화학
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2002-11-28
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1268
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11
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