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Applications
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2003-02-10 |
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PicoDot Wafer Flat Finder
Semiconductor wafers are positioned such that the edge of each wafer is sensed by the PicoDot, exactly at the sensor focus. The wafer is rotated. The PicoDot looses its return light signal when the flat is rotated into view of the sensor (i.e. the surface of the flat falls beyond the focus point of the sensor).
Objective:
To position semiconductor wafers by sensing the locator "flat".
Sensor Models:
PicoDot¢ç convergent mode model PD45VN6C100.
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Color Sensor
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2006-07-03
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LG Series Board Thickness Inspection
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2003-02-14
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2006-07-04
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PicoDot Wafer Mapping in FOUP
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2003-02-10
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LT3 Log Profiling
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1710
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PicoDot Wafer Flat Finder
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2003-02-10
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SL30 Gear Tooth Sensing
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1658
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Q45U Roll Diameter
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1651
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