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Applications
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2003-02-07 |
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MINI-BEAM Expert Wafer Cassette Presence Sensing
Silicon wafers are transported in cassettes from one location to another on a conveyor. Individual plastic fiber optics are located on both sides of the conveyor in the opposed sensing mode. L2 lenses are fitted onto each fiber sensing tip to extend sensing range. The beam is broken whenever a cassette is present.
Objective:
To sense the presence of wafer cassettes on a conveyor.
Sensor Models:
MINI-BEAM Expert SME312FP
ÀÚ·áÃâó : BANNER
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222 |
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MINI-BEAM Fill Level
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2003-02-07
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703
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221 |
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MINI-BEAM Expert Wafer Cassette Presence Sensing
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-07
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696
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220 |
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MINI-BEAM Expert Hard Disk Detection
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2003-02-07
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730
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219 |
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MINI-BEAM Expert Wafer Flatness Detection
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-07
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703
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218 |
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M12 and Q23 Wafer Mapping and Edge Detection
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2003-02-06
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3993
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217 |
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LT3 Web Break Detection
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-06
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715
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216 |
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LT3 Hopper Level Monitoring
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-06
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725
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215 |
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LT3 Error-Proofing a Laser Cutting Operation
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-06
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734
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214 |
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LT3 2-Axis Crane Positioning
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-06
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710
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213 |
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LS10 Parts Count
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2003-02-06
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800
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212 |
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D12 Wafer Cassette Slurry
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-05
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820
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11
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