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¤ýÀÛ¼ºÀÏ 2003-02-07
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MINI-BEAM Expert Wafer Cassette Presence Sensing

Silicon wafers are transported in cassettes from one location to another on a conveyor. Individual plastic fiber optics are located on both sides of the conveyor in the opposed sensing mode. L2 lenses are fitted onto each fiber sensing tip to extend sensing range. The beam is broken whenever a cassette is present.


Objective:
To sense the presence of wafer cassettes on a conveyor.

Sensor Models:
MINI-BEAM Expert SME312FP

ÀÚ·áÃâó : BANNER

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3500
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222
MINI-BEAM Fill Level Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 703
221
MINI-BEAM Expert Wafer Cassette Presence Sensing Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 696
220
MINI-BEAM Expert Hard Disk Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 730
219
MINI-BEAM Expert Wafer Flatness Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 703
218
M12 and Q23 Wafer Mapping and Edge Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 3993
217
LT3 Web Break Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 715
216
LT3 Hopper Level Monitoring Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 725
215
LT3 Error-Proofing a Laser Cutting Operation Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 734
214
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213
LS10 Parts Count Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 800
212
D12 Wafer Cassette Slurry Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-05 820
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