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¤ýÀÛ¼ºÀÏ 2003-02-07
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MINI-BEAM Expert Wafer Cassette Presence Sensing

Silicon wafers are transported in cassettes from one location to another on a conveyor. Individual plastic fiber optics are located on both sides of the conveyor in the opposed sensing mode. L2 lenses are fitted onto each fiber sensing tip to extend sensing range. The beam is broken whenever a cassette is present.


Objective:
To sense the presence of wafer cassettes on a conveyor.

Sensor Models:
MINI-BEAM Expert SME312FP

ÀÚ·áÃâó : BANNER

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3500
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222
MINI-BEAM Fill Level Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 705
221
MINI-BEAM Expert Wafer Cassette Presence Sensing Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 698
220
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219
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218
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217
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216
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215
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214
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213
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212
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