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Applications
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2003-02-07 |
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MINI-BEAM Expert Wafer Flatness Detection
The MINI-BEAM Expert diffuse sensor, with its visible red beam, is an excellent option for detecting the position of specular surfaces. The Expert TEACH-mode programming enables the sensor to "look for" a small window of acceptable distance, so it can detect high spots of an improperly seated wafer as it passes by on the carousel.
Objective:
Verify that the wafer is perpendicular to the sensing axis
Sensor Models:
MINI-BEAM Expert SME312DV
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222 |
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MINI-BEAM Fill Level
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2003-02-07
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706
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221 |
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MINI-BEAM Expert Wafer Cassette Presence Sensing
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2003-02-07
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698
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220 |
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MINI-BEAM Expert Hard Disk Detection
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2003-02-07
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732
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219 |
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MINI-BEAM Expert Wafer Flatness Detection
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-07
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706
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218 |
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M12 and Q23 Wafer Mapping and Edge Detection
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2003-02-06
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4024
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217 |
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LT3 Web Break Detection
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2003-02-06
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720
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216 |
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LT3 Hopper Level Monitoring
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2003-02-06
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727
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215 |
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LT3 Error-Proofing a Laser Cutting Operation
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2003-02-06
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736
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214 |
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LT3 2-Axis Crane Positioning
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2003-02-06
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714
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213 |
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LS10 Parts Count
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2003-02-06
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803
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212 |
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D12 Wafer Cassette Slurry
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2003-02-05
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823
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11
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