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MINI-BEAM Expert Wafer Flatness Detection

The MINI-BEAM Expert diffuse sensor, with its visible red beam, is an excellent option for detecting the position of specular surfaces. The Expert TEACH-mode programming enables the sensor to "look for" a small window of acceptable distance, so it can detect high spots of an improperly seated wafer as it passes by on the carousel.


Objective:
Verify that the wafer is perpendicular to the sensing axis

Sensor Models:
MINI-BEAM Expert SME312DV

ÀÚ·áÃâó : BANNER

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3500
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222
MINI-BEAM Fill Level Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 706
221
MINI-BEAM Expert Wafer Cassette Presence Sensing Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 698
220
MINI-BEAM Expert Hard Disk Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 730
219
MINI-BEAM Expert Wafer Flatness Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-07 705
218
M12 and Q23 Wafer Mapping and Edge Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 4018
217
LT3 Web Break Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 717
216
LT3 Hopper Level Monitoring Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 726
215
LT3 Error-Proofing a Laser Cutting Operation Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 735
214
LT3 2-Axis Crane Positioning Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 712
213
LS10 Parts Count Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-06 801
212
D12 Wafer Cassette Slurry Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-05 822
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