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| ㆍ작성일 |
2003-02-05 |
| ㆍ첨부#2 |
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| ㆍ응용분야 | 전기전자, 기계, 화학 |
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ㆍ추천: 0 ㆍ조회: 845  
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D12 Wafer Cassette Slurry
Silicon wafers are transported from one process to another in a cassette. These cassettes are moved via a conveyor which is totally submersed in de-ionized water. Teflon-encapsulated opposed-mode fibers are located on either side of the conveyor. The endtips of the fiber optic cables can be fully submersed in the water. When the cassette is present, the opposed beam is broken.
Objective:
To sense the presence of a wafer cassette on a conveyor submersed in de-ionized water
Sensor Models:
D12SN6FP
Fiber Optic Models:
PIE46UT
자료출처 : BANNER
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| 번호 |
 |
글 제 목 |
응용분야 |
작성일 |
조회 |
|
222 |
|
 MINI-BEAM Fill Level
|
전기전자, 기계, 화학
|
2003-02-07
|
725
|
|
|
221 |
|
MINI-BEAM Expert Wafer Cassette Presence Sensing
|
전기전자, 기계, 화학
|
2003-02-07
|
729
|
|
|
220 |
|
MINI-BEAM Expert Hard Disk Detection
|
전기전자, 기계, 화학
|
2003-02-07
|
755
|
|
|
219 |
|
MINI-BEAM Expert Wafer Flatness Detection
|
전기전자, 기계, 화학
|
2003-02-07
|
732
|
|
|
218 |
|
M12 and Q23 Wafer Mapping and Edge Detection
|
전기전자, 기계, 화학
|
2003-02-06
|
4195
|
|
|
217 |
|
LT3 Web Break Detection
|
전기전자, 기계, 화학
|
2003-02-06
|
745
|
|
|
216 |
|
LT3 Hopper Level Monitoring
|
전기전자, 기계, 화학
|
2003-02-06
|
763
|
|
|
215 |
|
LT3 Error-Proofing a Laser Cutting Operation
|
전기전자, 기계, 화학
|
2003-02-06
|
775
|
|
|
214 |
|
LT3 2-Axis Crane Positioning
|
전기전자, 기계, 화학
|
2003-02-06
|
737
|
|
|
213 |
|
LS10 Parts Count
|
전기전자, 기계, 화학
|
2003-02-06
|
829
|
|
|
212 |
|
D12 Wafer Cassette Slurry
|
전기전자, 기계, 화학
|
2003-02-05
|
845
|
|
11
|
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