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¤ýÀÛ¼ºÀÏ 2003-02-10
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PicoDot Wafer Flat Finder

Semiconductor wafers are positioned such that the edge of each wafer is sensed by the PicoDot, exactly at the sensor focus. The wafer is rotated. The PicoDot looses its return light signal when the flat is rotated into view of the sensor (i.e. the surface of the flat falls beyond the focus point of the sensor).


Objective:
To position semiconductor wafers by sensing the locator "flat".

Sensor Models:
PicoDot¢ç convergent mode model PD45VN6C100.

ÀÚ·áÃâó : BANNER

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244
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243
PresencePLUS Pro Multiple Component Location Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-12 712
242
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241
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240
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239
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238
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237
PresencePLUS Gear Curing Verification Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-11 717
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PicoDot Wafer Flat Finder Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-10 1712
234
PICO-AMP Wafer Protrusion Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-10 949
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