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¤ýÀÛ¼ºÀÏ 2003-02-10
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¤ýÀÀ¿ëºÐ¾ß Àü±âÀüÀÚ, ±â°è, È­ÇÐ
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PICO-AMP Wafer Protrusion Detection

A wafer protruding from a cassette can be broken or damaged. This decreases the throughput and can interrupt a process. The MD14BB6 amplifier, used in conjunction with the SP8ER1 remote sensors, offer a very small sensor with a small (1.5 mm) effective beam. The maximum opposed range is 300 mm (12").


Objective:
To detect when a wafer is protruding from a wafer cassette

Sensor Models:
SP8ER1, MD14BB6 amplifier

ÀÚ·áÃâó : BANNER

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3500
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244
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243
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242
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240
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239
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238
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PICO-AMP Wafer Protrusion Detection Àü±âÀüÀÚ, ±â°è, È­ÇÐ 2003-02-10 950
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