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Applications
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2003-02-10 |
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PICO-AMP Wafer Protrusion Detection
A wafer protruding from a cassette can be broken or damaged. This decreases the throughput and can interrupt a process. The MD14BB6 amplifier, used in conjunction with the SP8ER1 remote sensors, offer a very small sensor with a small (1.5 mm) effective beam. The maximum opposed range is 300 mm (12").
Objective:
To detect when a wafer is protruding from a wafer cassette
Sensor Models:
SP8ER1, MD14BB6 amplifier
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244 |
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PresencePLUS Pro Part Orientation Verification
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2003-02-12
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759
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243 |
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PresencePLUS Pro Multiple Component Location
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2003-02-12
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712
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242 |
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PresencePLUS Pro Label Positioning
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2003-02-11
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728
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241 |
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PresencePLUS Pro Gap (Pitch) Measurement
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2003-02-11
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771
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240 |
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PresencePLUS Pro Date/Lot Code Verification
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2003-02-11
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732
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239 |
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PresencePLUS Pro Complete Blister Package Verification
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2003-02-11
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810
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238 |
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PresencePLUS Missing Bottle Label Detection
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2003-02-11
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845
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237 |
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PresencePLUS Gear Curing Verification
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2003-02-11
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717
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236 |
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PicoDot Wafer Mapping in FOUP
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2003-02-10
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1886
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235 |
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PicoDot Wafer Flat Finder
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2003-02-10
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1712
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234 |
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PICO-AMP Wafer Protrusion Detection
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Àü±âÀüÀÚ, ±â°è, ÈÇÐ
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2003-02-10
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950
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11
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