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¤ýÀÛ¼ºÀÏ 2003-02-13
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S12 and M12 Protrusion Protection and Home Position Sensing

The opposed M12 emitter and EZ-Beam receiver pair are positioned to detect whether any wafers are protruding from the open side of a transfer cassette, before the transfer door is closed. The PicoDot, with its precise focus, looks for a feature on the wafer blade to indicate that the robot is in "home" position.


Objective:
Verify for 2 conditions; that no wafers are protruding from the outer limits of a cassette, and robot "home" position.

Sensor Models:
PD45VN6C200 , S12 receiver/M126 emitter.

ÀÚ·áÃâó : BANNER

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