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Applications
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2003-02-06 |
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M12 and Q23 Wafer Mapping and Edge Detection
A laser emitter is used to offer a small beam pattern. The receiver uses an aperture with a 0.2" horizontal slot to ensure complete beam blockage by the wafer. The wafer cassette is located on a vertical elevator and is moved up and down while the cassette is mapped.
Objective:
To detect wafers in a wafer cassette
Sensor Models:
M126E2LD, Q23SN6R with AP19-00, modified with a 0.5 mm (0.02
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2003-02-17
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2003-02-17
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MINI-BEAM Film Web Break Detection
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2003-02-22
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AGV¿ë Laser Scanner
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2006-09-14
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M12 and Q23 Wafer Mapping and Edge Detection
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2003-02-06
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Laser Scanner 2 (Width ÃøÁ¤)
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2006-07-07
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Absolute Linear Encoder
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2006-07-05
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2002-10-27
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